These devices are capable to measure spectral parameters of tested objects in wide range of wavelengths, from UV to near IR. Two optical architectures have been implemented in the systems:
- Folded configuration with mirror optics, diffractive grating and a very high sensitivity CCD detector.
- Configuration of spectral imager based on an Acousto-Optical Modulator (AOM) as a tunable filter electrically switchable between different wavelengths.
The first configuration is used in the products exploited for in-process control of semiconductors industry whereas the second one is intended for analysis of biological objects.
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- Spectral analyzers for UV-to near IR wavelengths
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- Spectral analyzers for UV-to near IR wavelengths